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Nano-electro-mechanical systems (NEMS)
Article By:
Hao, Ling Quantum Detection Group, National Physical Laboratory, Teddington, Middlesex, United Kingdom.
Gallop, John Quantum Detection Group, National Physical Laboratory, Teddington, Middlesex, United Kingdom.
Last reviewed:2013
DOI:https://doi.org/10.1036/1097-8542.YB130172
Nano-electro-mechanical systems (NEMS) represent an important new class of device which has a growing range of applications, from tests of basic quantum mechanics through nanoscale metrology to a vast number of sensors. These promise a variety of applications, from single-phonon detection to ultrasensors for physical parameters such as mass, force, charge, spin, and chemical specificity. Single-molecule biosensing, information storage and processing technologies, and nanoscale refrigerators can be expected in the longer term.
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